|
Special
Requirements for ISO Class 3 Cleanrooms
|
| Air Quality |
Total Hydrocarbons <1 ppm; Na <0.1 µg/m3 |
| Fresh Air Intake |
0.5 m3 /min per sqm of cleanroom floor area |
| Vibration |
<0.1 µ ( Building); <0.01 µ ( Equipment)
rms |
| Noise |
< 55 dbA |
| Temperature |
0.1 degree C |
| Humidity |
< 2% |
| Magnetic field var |
< 1 mG |
| Static charge |
< 50 v |
